Numerical simulation of polysilicon deposition characteristics in chemical vapor deposition process
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چکیده
منابع مشابه
Simulation of Epitaxial Silicon Chemical Vapor Deposition in Barrel Reactors
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ژورنال
عنوان ژورنال: Thermal Science
سال: 2018
ISSN: 0354-9836,2334-7163
DOI: 10.2298/tsci171009057a